Industry Ultrasonic Atomization Machine with Spray Nozzle for High Efficiency Coating
Ultrasonic photoresist spraying system is a complete solution to coating semiconductor with uniform photoresist film.
Compared with traditional spin coating, ultrasonic spray photoresist coating has advantages in depositing more uniform coating, especially in high aspect ratio groove and V-shaped groove structure, centrifugal spin coating can not deposit uniform coating along the side wall to form a film, and there is not too much photoresist deposited at the bottom of the cavity. It has been proved that direct spraying with ultrasonic technology is a reliable and effective method to deposit photoresist on 3D microstructure, thus reducing equipment failure caused by excessive metal exposure to resist coating.
Equipment composition:
The whole machine is composed of ultrasonic atomizing nozzle, special driving power supply, three-axis linkage servo system, intelligent operating system, liquid supply system, low-speed air shaping device, shell and box, etc.
Advantages:
High uniform film coverage for various surface profiles.
The groove with high aspect ratio can be coated with high uniformity.
Non clogging spray.
Thin single micron layers can be deposited with high uniformity.
Proven repeatable spray process.
High uniformity: ultrasonic spraying is a high performance industrial precision spraying technology, used for high uniformity of submicron and nano film coating.
Material saving and environmental protection: because low pressure spray is not easy to control, and the liquid drops on the substrate instead of rebound from the substrate, it can ensure that the amount of over spray can be significantly reduced, and a large amount of material can be saved and environmental emissions can be reduced. The coating utilization rate of ultrasonic spraying is more than 4 times of that of traditional two fluid spraying.
Application:
For MEMS wafers and other substrates with different morphologies.
Ultrasonic spraying equipment is mainly used in fuel cells, thin film photovoltaic cells, thin film solar coatings, perovskite solar cells, solar cells, graphene coating, silicon photovoltaic cells, glass coating, electronic circuits and other industries. The spray head can be applied to various solutions, sewage, chemical liquid and oil mucus can also be atomized.
Features:
Uniform coating: uniformity >95%
Saving raw materials: raw material utilization rate is over 85%, 4 times that of traditional air spray nozzle
High control accuracy of coating thickness : 20 nm to tens of micron coatings can be precisely sprayed.
Non clogging
Anti-corrosion nozzle
High precision, high controllable spray.
Hot Tags: ultrasonic atomization machine with spray nozzle for high efficiency coating, China ultrasonic atomization machine with spray nozzle for high efficiency coating suppliers, manufacturers, factory
