Ultrasonic Chip Atomization Coating Equipment
Ultrasonic Chip Atomization Coating Equipment

Ultrasonic Chip Atomization Coating Equipment

Compared with traditional spin coating, ultrasonic spray photoresist coating has advantages in depositing more uniform coating, especially in high aspect ratio groove and V-shaped groove structure, centrifugal spin coating can not deposit uniform coating along the side wall to form a film, and there is not too much photoresist deposited at the bottom of the cavity.
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100k Ultrasonic chip atomization coating equipment

ultrasonic spray

Advantages of ultrasonic spray stent coating:

• Highly controllable and repeatable spray application.

• Non-clogging ultrasonic technology.

• Capable of spraying in microliters per hour.

• Droplet size as small as 9 microns (in use) with very tight droplet distribution.

• Low velocity spray adheres to brackets without bouncing or overspray.

• Proven process for coating implantable stents and other delicate devices.

• Highly durable coating will not peel.

• Experience with dozens of coatings running on hundreds of systems


Ultrasonic atomizer/spray machine consists of high-power ultrasonic generator and ultrasonic energy converter, ultrasonic metal spray head. The generator drives the energy converter to generate high-frequency sound (mechanical energy), and transmits this mechanical energy to the metal atomizing head, and uses the ultrasonic energy of 15KHz-50KHz vibration per second to melt water or other types of liquids, and convert the liquid into liquid. Instantly crush and disperse to form tiny particles of 0.1 micron to dozens of microns, so as to achieve the purpose of humidifying air, liquid granulation, mixing, promoting chemical reaction, spraying, metal melt powder and so on.


Equipment composition:

The whole machine is composed of ultrasonic atomizing nozzle, special driving power supply, three-axis linkage servo system, intelligent operating system, liquid supply system, low-speed air shaping device, shell and box, etc.

Drawing1

Advantages:

High uniform film coverage for various surface profiles.

The groove with high aspect ratio can be coated with high uniformity.

Non clogging spray.

Thin single micron layers can be deposited with high uniformity.

Proven repeatable spray process.

High uniformity: ultrasonic spraying is a high performance industrial precision spraying technology, used for high uniformity of submicron and nano film coating.

Material saving and environmental protection: because low pressure spray is not easy to control, and the liquid drops on the substrate instead of rebound from the substrate, it can ensure that the amount of over spray can be significantly reduced, and a large amount of material can be saved and environmental emissions can be reduced. The coating utilization rate of ultrasonic spraying is more than 4 times of that of traditional two fluid spraying.

ultrasonic spary

Application:

For MEMS wafers and other substrates with different morphologies.

Ultrasonic spraying equipment is mainly used in fuel cells, thin film photovoltaic cells, thin film solar coatings, perovskite solar cells, solar cells, graphene coating, silicon photovoltaic cells, glass coating, electronic circuits and other industries. The spray head can be applied to various solutions, sewage, chemical liquid and oil mucus can also be atomized.


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